Design and optimization of a MEMS quartz mass sensor array for biosensing
Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design,...
Saved in:
Main Authors: | Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin, Md Ralib, Aliza Aini, Ab Rahim, Rosminazuin, Khan, Sheroz, Guines, Cyril, Chatras, Matthieu, Pothier, Arnaud |
---|---|
Format: | Conference or Workshop Item |
Language: | English English |
Published: |
Institute of Electrical and Electronics Engineers Inc.
2018
|
Subjects: | |
Online Access: | http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf http://irep.iium.edu.my/67267/ https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8311996 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Verification of quartz crystal microbalance array using vector network analyzer and openQCM
by: Zainuddin, Ahmad Anwar, et al.
Published: (2018) -
Simulation of MEMs piezoelectric energy harvester
by: Md Ralib, Aliza Aini, et al.
Published: (2010) -
Investigation on the mass sensitivity of quartz crystal microbalance gas sensor using finite element simulation
by: Md Ralib, Aliza Aini, et al.
Published: (2019) -
A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2017) -
Design of two-stage CMOS amplifier for quartz crystal resonator
by: Mohd Taufik, Muhammad Syamsi, et al.
Published: (2013)