Design and simulation of 10 MHz MEMS oscillator

• Main Authors: Taufik, Mohamad Syamsi, Khan, Sheroz, Nordin, Anis Nurashikin, Zainuddin, Ahmad Anwar
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2014
• Subjects: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/39245/1/06860920.pdf; http://irep.iium.edu.my/39245/; http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6860920

Design and analysis of a 10MHz oscillator is presented. To perform oscillator circuit simulations, the CMOS-MEMS Clamped-Clamped beam) resonator structure is modeled using its RLC equivalent circuit approach. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with an...