Theoretical and simulated investigation of dielectric charging effect on a capacitive RF-MEMS switch

• Main Authors: Ma, Li Ya, Soin, Norhayati, Nordin, Anis Nurashikin
• Format: Conference or Workshop Item
• Language: English; English
• Published: 2016
• Subjects: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/52755/8/52755-new.pdf; http://irep.iium.edu.my/52755/9/52755-Theoretical%20and%20simulated%20investigation%20of%20dielectric%20charging%20effect%20on%20a%20capacitive%20RF-MEMS%20switch_SCOPUS.pdf; http://irep.iium.edu.my/52755/; http://ieeexplore.ieee.org/document/7573580/

Dielectric charges cause stiction problems in most capacitive RF-MEMS switches, creating a major reliability issue during production. A new method based on finite-element- method simulation is developed in this paper to analyze the dielectric charging effect on the RF-MEMS switch’s pull voltages (na...