Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators

• Main Authors: Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin, Pandian, Monharaj Soundara, Khan, Sheroz
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2013
• Subjects: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/49602/1/49602.pdf; http://irep.iium.edu.my/49602/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6706469&tag=1

We present the design and analysis result of a low power, low noise, 20 MHz CMOS-MEMS oscillators. To perform oscillator circuit simulations, the CMOS-MEMS resonator (Clamped-Clamped beam) was modeled using its RLC equivalent circuits. For a MEMS resonator to be able to function as an oscillator it...