Design and optimization of a MEMS quartz mass sensor array for biosensing

• Main Authors: Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin, Md Ralib, Aliza Aini, Ab Rahim, Rosminazuin, Khan, Sheroz, Guines, Cyril, Chatras, Matthieu, Pothier, Arnaud
• Format: Conference or Workshop Item
• Language: English; English
• Published: Institute of Electrical and Electronics Engineers Inc. 2018
• Subjects: TA168 Systems engineering; TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf; http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf; http://irep.iium.edu.my/67267/; https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8311996

Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design,...