Equivalent circuit modeling of two-port Al-doped Zinc Oxide CMOS SAW resonator using MATLAB™

• Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Hashim, Uda
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/46636/1/46636.pdf; http://irep.iium.edu.my/46636/; http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6671581&refinements%3D4229367476%26filter%3DAND%28p_IS_Number%3A6671555%29

The accelerated growth of wireless communication system has increased the interest of research in CMOS integration in RF MEMS. A complete integrated silicon based resonator potentially eliminates lossy interfacing to on chip electronics. This paper presents the equivalent circuit modeling of a CMOS...