Finite element analysis of silicon nanowire array based SAW gas sensor

• Main Authors: Ahmad Asri, Muhammad Izzudin, Hasan, Md. Nazibul, Ahmad Fua’ad, Mariatul Rawdhah, Abd. Hamid, Fatimah Khairiah, Md. Yunos, Yusri, Mohamed Ali, Mohamed Sultan
• Format: Article
• Language: English
• Published: Penerbit UTM Press 2021
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/97820/1/YusriMdYunos2021_FiniteElementAnalysisofSiliconNanowire.pdf; http://eprints.utm.my/id/eprint/97820/; https://elektrika.utm.my/index.php/ELEKTRIKA_Journal/article/view/305

This work presents the design and finite element analysis of a surface acoustic wave (SAW)-based sensor for the detection of volatile organic compound (VOC) gases. The effect of silicon nanowire array (SiNWA) on a 128º YX-lithium niobate (LiNbO3) substrate for sensing the VOC gases was simulated usi...