Vertically-tapered silicon nanowire arrays prepared by plasma enhanced chemical vapor deposition: synthesis, structural characterization and photoluminescence

• Main Authors: Hamidinezhad, Habib, Akbar Ashkarran, Ali, Malek, Zulkurnain Abdul
• Format: Article
• Published: Elsevier 2014
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/63213/; http://dx.doi.org/10.1016/j.mssp.2014.06.018

Vertically aligned silicon nanowires (SiNWs) have been successfully synthesized using pure silane gas as a precursor by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of the growth temperature on the morphology, structure and photoluminescence properties...