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Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films

Diamond like carbon (DLC) thin films were grown onto glass substrates by using direct current plasma enhance chemical vapour deposition (DC-PECVD) system. Films were deposited under fixed deposition pressure (4 × 10-1 Torr), substrate temperature (500 °C) and deposition time (3 hours) but with diffe...

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書誌詳細
第一著者:	Deraman, Karim
フォーマット:	論文
出版事項:	Trans Tech Publications 2014
主題:	Q Science
オンライン･アクセス:	http://eprints.utm.my/id/eprint/62428/ http://dx.doi.org/10.4028/www.scientific.net/AMR.970.128
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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