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Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films

Diamond like carbon (DLC) thin films were grown onto glass substrates by using direct current plasma enhance chemical vapour deposition (DC-PECVD) system. Films were deposited under fixed deposition pressure (4 × 10-1 Torr), substrate temperature (500 °C) and deposition time (3 hours) but with diffe...

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Main Author: Deraman, Karim
Format: Article
Published: Trans Tech Publications 2014
Subjects:
Q Science
Online Access:http://eprints.utm.my/id/eprint/62428/
http://dx.doi.org/10.4028/www.scientific.net/AMR.970.128
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spelling my.utm.624282017-06-14T01:34:53Z http://eprints.utm.my/id/eprint/62428/ Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films Deraman, Karim Q Science Diamond like carbon (DLC) thin films were grown onto glass substrates by using direct current plasma enhance chemical vapour deposition (DC-PECVD) system. Films were deposited under fixed deposition pressure (4 × 10-1 Torr), substrate temperature (500 °C) and deposition time (3 hours) but with different flow rate of precursor gas (methane, hydrogen and argon). The fabricated films were characterized by using x-ray diffraction (XRD) and atomic force microscopy (AFM). XRD has revealed that the DLC films were having amorphous phase as the XRD spectrum did not show any obvious sharp peak. From AFM, it was discovered that the precursor gas flow rate has inversely relationship with the grain size and surface roughness of films. Trans Tech Publications 2014 Article PeerReviewed Deraman, Karim (2014) Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films. Advanced Materials Research, 970 . pp. 128-131. ISSN 1022-6680 http://dx.doi.org/10.4028/www.scientific.net/AMR.970.128 DOI:10.4028/www.scientific.net/AMR.970.128
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
topic Q Science
spellingShingle Q Science
Deraman, Karim
Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films
description Diamond like carbon (DLC) thin films were grown onto glass substrates by using direct current plasma enhance chemical vapour deposition (DC-PECVD) system. Films were deposited under fixed deposition pressure (4 × 10-1 Torr), substrate temperature (500 °C) and deposition time (3 hours) but with different flow rate of precursor gas (methane, hydrogen and argon). The fabricated films were characterized by using x-ray diffraction (XRD) and atomic force microscopy (AFM). XRD has revealed that the DLC films were having amorphous phase as the XRD spectrum did not show any obvious sharp peak. From AFM, it was discovered that the precursor gas flow rate has inversely relationship with the grain size and surface roughness of films.
format Article
author Deraman, Karim
author_facet Deraman, Karim
author_sort Deraman, Karim
title Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films
title_short Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films
title_full Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films
title_fullStr Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films
title_full_unstemmed Relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films
title_sort relationship between precursor gas flow rate with the structural and morphology properties of diamond like carbon films
publisher Trans Tech Publications
publishDate 2014
url http://eprints.utm.my/id/eprint/62428/
http://dx.doi.org/10.4028/www.scientific.net/AMR.970.128
_version_ 1643655416304893952
score 13.214268

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