Characterization of nitrogen doped amorphous carbon thin film using natural precursor / Saifullizan Saidon

• Main Author: Saidon, Saifullizan
• Format: Student Project
• Language: English
• Published: 2013
• Subjects: Descriptive and experimental mechanics; Electricity
• Online Access: http://ir.uitm.edu.my/id/eprint/46402/1/46402.pdf; http://ir.uitm.edu.my/id/eprint/46402/

This reports present on the deposition of semiconducting amorphous carbon (a-C) films fabricated onto the glass substrate and n-type silicon by Thermal Chemical Vapour Deposition (CVD) using natural source of camphoric carbon as the precursor material. Those samples were deposited . at different flo...