Nanostructured Diamond-Like Carbon Films Grown by Off-Axis Pulsed Laser Deposition

• Main Authors: Yap, S.S., Nee, C.H., Yap, S.L., Tou, T.Y.
• Format: Article
• Published: Hindawi Publishing Corporation 2015
• Subjects: Q Science (General); QC Physics; TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.um.edu.my/19397/; http://dx.doi.org/10.1155/2015/731306

Nanostructured diamond-like carbon (DLC) films instead of the ultrasmooth film were obtained by pulsed laser ablation of pyrolytic graphite. Deposition was performed at room temperature in vacuum with substrates placed at off-axis position. The configuration utilized high density plasma plume arrivi...