The effects of gas flow rate and annealing on the morphological properties of zinc oxide nanostructures thin film using chemical vapour deposition process

• Main Authors: Khoo, Wei How, Mohamed Sultan, Suhana, Sahdan, M. Z.
• Format: Conference or Workshop Item
• Published: UTM 2016
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/67049/; http://www.mjfas.utm.my/index.php/mjfas/article/view/428

Zinc Oxide nanostructures thin films have been deposited on glass substrates by using chemical vapour deposition technique at 1000°C assisted by gas blocker. Glass substrates was sputtered by ~5nm of gold to form a catalyst layer on top of glass. Different gas flow rates of 0.05, 0.10, 0.20, 0.40 L/...