Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties

Undoped diamond - like carbon thin films have been grown by DC - PECVD system. The synthesis of the DLC films was carried out in the presence of gas of (CH4 + H2 + Ar) in a custom - made reactor. The substrate temperature was initiated from the range of 300 °C to 600 °C under an optimum pressurized...

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Bibliographic Details
Main Authors: Keng Yik, Jackie Chen, Deraman, Karim, Ong, Wai Kit, Wan Shamsuri, Wan Nurulhuda, Hussin, Rosli
Format: Conference or Workshop Item
Published: 2013
Subjects:
Online Access:http://eprints.utm.my/id/eprint/67125/
http://dx.doi.org/10.4028/www.scientific.net/AMR.970.136
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