VHF-PECVD fabrication parameters dependent morphologyvariation of gold catalyst assisted silicon thin film growth
Achieving two dimensional quantum structure of silicon with well-defined tunable morphology is an outstanding issue. We present the preliminary results on fabrication parameters dependent silicon thin film production using VHF-PECVD method. Five samples are prepared on Si(100) substrate with gold (A...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penerbit Universiti Teknologi Malaysia
2015
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| Subjects: | |
| Online Access: | http://eprints.utm.my/55760/1/KhaidzirHamzahMAbdullahIzatMohdYassinSibKrishnaGhoshal2015_VHFPECVDFabricationParametersDependentMorphologyvariation.pdf http://eprints.utm.my/55760/ http://dx.doi.org/http://dx.doi.org/10.11113/jt.v76.4030 |
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