A comparative study of nanocrystalline SiC thin films on multimode optical fiber sensors, synthesized via DBD-NTP and 150 MHz VHF-PECVD

• Main Authors: Younus, Marwan Hafeedh, Khalajabadi, Shahrouz Zamani, Mat Yajid, Muhammad Azizi, Abu, Aminudin, Ameen, Odai Falah, Redzuan, Norizah, Ahmad, Norhayati, Omar, Muhammad Firdaus, Raja Ibrahim, Raja Kamarulzaman
• Format: Article
• Published: Elsevier Ltd 2018
• Subjects: QC Physics
• Online Access: http://eprints.utm.my/id/eprint/86119/; http://dx.doi.org/10.1016/j.ceramint.2017.11.137

In this study, nanocrystalline SiC films were successfully synthesized on the surface of multimode fiber (MMF) sensors using 150 MHz very-high-frequency plasma-enhanced chemical vapor deposition (VHF-PECVD) and dielectric barrier discharge nonthermal plasma (DBD-NTP) methods. The effects of the diff...