Influence of growth time on morphology and structural properties of silicon nanowires grown by VHF-PECVD
In this research, gold catalyzed silicon nanowires (SiNWs) were synthesized on a Si(111) substrate using very high frequency plasma enhanced chemical vapor deposition method based on a vaporliquidsolid growth mechanism at various growth durations. The results showed that the obtained SiNWs were need...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Elsevier B.V.
2011
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/29214/ http://dx.doi.org/10.1016/j.jcrysgro.2011.07.034 |
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