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Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning

Fine stages are widely used in microscope systems, optical systems, and manufacturing systems. Electrostatic actuators have some advantages in terms of their low heat production and material availability. They are also able to transmit power without mechanical contact and do not require hinges...

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Bibliographic Details
Main Author: Md Ghazaly , Mariam
Format: Conference or Workshop Item
Language:English
Published: 2012
Subjects:
TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utem.edu.my/id/eprint/8978/1/%5B1%5D_ASPE2012.pdf
http://eprints.utem.edu.my/id/eprint/8978/
http://aspe.net/technical-meetings/past-aspe-meetings/2012-summer-topical-meeting/
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id my.utem.eprints.8978
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spelling my.utem.eprints.89782015-05-28T04:00:35Z http://eprints.utem.edu.my/id/eprint/8978/ Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning Md Ghazaly , Mariam TJ Mechanical engineering and machinery TK Electrical engineering. Electronics Nuclear engineering Fine stages are widely used in microscope systems, optical systems, and manufacturing systems. Electrostatic actuators have some advantages in terms of their low heat production and material availability. They are also able to transmit power without mechanical contact and do not require hinges. In addition, the multilayered structure can increase the produced thrust force. 2012-06-24 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/8978/1/%5B1%5D_ASPE2012.pdf Md Ghazaly , Mariam (2012) Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning. In: ASPE 2012 Summer Topical Meeting, 24 - 26 June 2012, California, USA. http://aspe.net/technical-meetings/past-aspe-meetings/2012-summer-topical-meeting/
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Md Ghazaly , Mariam
Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning
description Fine stages are widely used in microscope systems, optical systems, and manufacturing systems. Electrostatic actuators have some advantages in terms of their low heat production and material availability. They are also able to transmit power without mechanical contact and do not require hinges. In addition, the multilayered structure can increase the produced thrust force.
format Conference or Workshop Item
author Md Ghazaly , Mariam
author_facet Md Ghazaly , Mariam
author_sort Md Ghazaly , Mariam
title Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning
title_short Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning
title_full Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning
title_fullStr Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning
title_full_unstemmed Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning
title_sort driving mode control of a multilayered thin electrostatic actuator supported by lubricating oil for ultra-precision positioning
publishDate 2012
url http://eprints.utem.edu.my/id/eprint/8978/1/%5B1%5D_ASPE2012.pdf
http://eprints.utem.edu.my/id/eprint/8978/
http://aspe.net/technical-meetings/past-aspe-meetings/2012-summer-topical-meeting/
_version_ 1665905380428873728
score 13.160551

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