Driving Mode Control of A Multilayered Thin Electrostatic Actuator Supported By Lubricating Oil For Ultra-Precision Positioning
Fine stages are widely used in microscope systems, optical systems, and manufacturing systems. Electrostatic actuators have some advantages in terms of their low heat production and material availability. They are also able to transmit power without mechanical contact and do not require hinges...
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2012
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Subjects: | |
Online Access: | http://eprints.utem.edu.my/id/eprint/8978/1/%5B1%5D_ASPE2012.pdf http://eprints.utem.edu.my/id/eprint/8978/ http://aspe.net/technical-meetings/past-aspe-meetings/2012-summer-topical-meeting/ |
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Summary: | Fine stages are widely used in microscope
systems, optical systems, and manufacturing
systems. Electrostatic actuators have some
advantages in terms of their low heat production
and material availability. They are also able to
transmit power without mechanical contact and
do not require hinges. In addition, the
multilayered structure can increase the
produced thrust force. |
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