Ferroelectric Thin Film Materials Deposition By Physical Vapor Deposition
Thin film is a layer of material that has the thickness that ranging from a few nanometers to a few micrometers and have been used in the fabrication of the MEMS devices. The properties of the thin films are affected by the type of the materials and one of the thin film materials is the ferroelec...
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| Format: | Monograph |
| Language: | English |
| Published: |
Universiti Sains Malaysia
2019
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| Online Access: | http://eprints.usm.my/58391/1/Ferroelectric%20Thin%20Film%20Materials%20Deposition%20By%20Physical%20Vapor%20Deposition.pdf http://eprints.usm.my/58391/ |
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