Surface roughness and morphology analysis using an atomic force microscopy of polycrystalline diamond coated Si3N4 deposited by microwave plasma assisted chemical vapor deposition
Diamond is the hardest material and has high chemical resistant which is one form of carbon. In the present work a study was carried out on polycrystalline diamond coated Si3N4 substrate. The diamond was deposited by Microwave Plasma Assisted Chemical Vapor Deposition (MPACVD) under varying depositi...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Scitec Publications Ltd.
2008
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/7704/ http://dx.doi.org/10.4028/www.scientific.net/SSP.136.153 |
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