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Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)

This study focuses on the properties of ZTO which have been deposited by a low-cost method namely aerosol assisted chemical vapor deposition (AACVD). The precursors used in this method were zinc acetate dihidrate and tin chloride dihydrate for ZTO thin film deposition. Both precursors were mixed and...

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Bibliographic Details
Main Authors: Muhammad Arif Riza, Abu Bakar Abd Rahman, Suhaila Sepeai, Norasikin Ahmad Ludin, Mohd Asri Mat Teridi, Mohd Adib Ibrahim
Format: Article
Language:English
Published: 2018
Subjects:
TP Chemical technology
Online Access:https://eprints.ums.edu.my/id/eprint/23620/1/Properties%20of%20zinc%20tin%20oxide%20thin%20film%20by%20aerosol%20assisted%20chemical%20vapor%20deposition.pdf
https://eprints.ums.edu.my/id/eprint/23620/
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https://eprints.ums.edu.my/id/eprint/23620/1/Properties%20of%20zinc%20tin%20oxide%20thin%20film%20by%20aerosol%20assisted%20chemical%20vapor%20deposition.pdf
https://eprints.ums.edu.my/id/eprint/23620/

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