Effect Of Post-Annealing In Oxygen Environment On Ito Thin Films Deposited Using RF Magnetron Sputtering
This work demonstrated the effect of post-annealing on electrical and optical properties of indium tin oxide (ITO) thin films. ITO with 100 nm thickness successfully deposited using radio frequency (RF) magnetron sputtering in oxygen-free environment on soda-lime glass substrate without substrate he...
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Main Authors: | Hamzah, N.A., Asri, R.I.M., Ahmad, M. A., Md Sahar, M. A. A. Z., Waheeda, S. N., Hassan, Z. |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2019
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Subjects: | |
Online Access: | http://eprints.usm.my/48902/1/ICoSeMT%202019%20ABSTRACT%20BOOK%2091.pdf http://eprints.usm.my/48902/ |
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