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PMMA characterization and optimization for Nano Structure formation

Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.

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Bibliographic Details
Main Authors:	S Niza, Mohammad Bajuri, Nur Hamidah, Abdul Halim, Mohammad Nuzaihan, Md Nor, Uda, Hashim
Format:	Working Paper
Language:	English
Published:	Kolej Universiti Kejuruteraan Utara Malaysia 2009
Subjects:	Electron beam lithography Resolution Resists thickness Polymethyl-Methacrylate (PMMA) Lithography, Electron beam Beam energy Nano structure
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/7102
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