Effects of target density on structure and properties of sputtered indium tin oxide films
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Main Authors: | Jung, Younghee, Kim, Kyooho, Badrul, Munir, Rachmat A., Wibowo |
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Other Authors: | bmunir@ui.ac.id. |
Format: | Article |
Language: | English |
Published: |
Universiti Malaysia Perlis
2016
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Subjects: | |
Online Access: | http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41227 |
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