Sputtering thin films: Materials, applications, challenges and future directions

• Main Authors: Garg R., Gonuguntla S., Sk S., Iqbal M.S., Dada A.O., Pal U., Ahmadipour M.
• Other Authors: 57220823468
• Format: Review
• Published: Elsevier B.V. 2025
• Subjects: Biocompatibility; Corrosion resistance; Corrosion resistant alloys; Medical applications; Metallic films; Sputtering; Sustainable development; Ultrathin films; Water pollution; alloy; carbon; fuel; metal oxide; Biomedical applications; Biomedical fields; Composition structure; Diverse applications; Environmental energy; Material application; Structures and properties; Thin film material; Thin-films; biocompatibility; catalyst; ceramics; corrosion; electronics; environmental sustainability; human; nonhuman; pharmaceutics; pharmacology; review; sputter deposition; water pollutant; Fuel cells

Sputtering is an effective technique for producing ultrathin films with diverse applications. The review begins by providing an in-depth overview of the background, introducing the early development of sputtering and its principles. Consequently, progress in advancements made in recent decades highl...