Holdings: Effects of target density on structure and properties of sputtered indium tin oxide films

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Bibliographic Details
Main Authors:	Jung, Younghee, Kim, Kyooho, Badrul, Munir, Rachmat A., Wibowo
Other Authors:	bmunir@ui.ac.id.
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis 2016
Subjects:	ITO thin films Transparent semiconductor Sputtering Target density Optical properties
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41227
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