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Effects of target density on structure and properties of sputtered indium tin oxide films

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Main Authors: Jung, Younghee, Kim, Kyooho, Badrul, Munir, Rachmat A., Wibowo
Other Authors: bmunir@ui.ac.id.
Format: Article
Language:English
Published: Universiti Malaysia Perlis 2016
Subjects:
ITO thin films
Transparent semiconductor
Sputtering
Target density
Optical properties
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41227
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id my.unimap-41227
record_format dspace
spelling my.unimap-412272017-11-21T03:40:38Z Effects of target density on structure and properties of sputtered indium tin oxide films Jung, Younghee Kim, Kyooho Badrul, Munir Rachmat A., Wibowo bmunir@ui.ac.id. ITO thin films Transparent semiconductor Sputtering Target density Optical properties Link to publisher's homepage at http://ijneam.unimap.edu.my/ Indium Tin Oxide (ITO) thin films were deposited from various target densities (98.7%~99.6%) using RF magnetron sputtering. Effect of the sputtering target densities on the structural, electrical and optical properties of deposited ITO thin films was investigated. The preferable (400) crystalline orientation peak was observed on the films deposited from < 99.0% target density. Higher target density produced films with higher roughness but lower resistivity. All of the deposited films showed optical transmittance more than 85% in the visible wavelength region. It is necessary to use the highest target for sputtering deposition of ITO thin films. 2016-03-31T04:26:36Z 2016-03-31T04:26:36Z 2011 Article International Journal of Nanoelectronics and Materials, vol.4 (2), 2011, pages 157-162 1985-5761 (Printed) 1997-4434 (Online) http://ijneam.unimap.edu.my/ http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41227 en Universiti Malaysia Perlis
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic ITO thin films
Transparent semiconductor
Sputtering
Target density
Optical properties
spellingShingle ITO thin films
Transparent semiconductor
Sputtering
Target density
Optical properties
Jung, Younghee
Kim, Kyooho
Badrul, Munir
Rachmat A., Wibowo
Effects of target density on structure and properties of sputtered indium tin oxide films
description Link to publisher's homepage at http://ijneam.unimap.edu.my/
author2 bmunir@ui.ac.id.
author_facet bmunir@ui.ac.id.
Jung, Younghee
Kim, Kyooho
Badrul, Munir
Rachmat A., Wibowo
format Article
author Jung, Younghee
Kim, Kyooho
Badrul, Munir
Rachmat A., Wibowo
author_sort Jung, Younghee
title Effects of target density on structure and properties of sputtered indium tin oxide films
title_short Effects of target density on structure and properties of sputtered indium tin oxide films
title_full Effects of target density on structure and properties of sputtered indium tin oxide films
title_fullStr Effects of target density on structure and properties of sputtered indium tin oxide films
title_full_unstemmed Effects of target density on structure and properties of sputtered indium tin oxide films
title_sort effects of target density on structure and properties of sputtered indium tin oxide films
publisher Universiti Malaysia Perlis
publishDate 2016
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41227
_version_ 1643802785554104320
score 13.222552

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