Electron and ion densities measurement in reactive magnetron zinc sputtering plasma
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Main Authors: | Nafarizal, Nayan, Mohd Zainizan, Sahdan, Riyaz Ahmad, Mohamad Ali, Sharifah Amira, Salwa, Omar, Mohamad Hafiz, Mamat, Uda, Hashim, Prof. Dr., Mohamad Rusop, Mahmood |
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Other Authors: | nafa@uthm.edu.my |
Format: | Article |
Language: | English |
Published: |
Trans Tech Publications
2014
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Subjects: | |
Online Access: | http://dspace.unimap.edu.my:80/dspace/handle/123456789/33563 |
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