Optical properties of zinc oxide thin films fabricated via radio frequency magnetron sputtering for optical hydrogen gas sensor application
This thesis focused on the optimization of zinc oxide (ZnO) thin films for optical hydrogen (H2) gas sensor using radio frequency (RF) magnetron sputtering technique. Various strategies were adopted to produce optically controlled thin films with the desired properties. This work focused on the effe...
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Format: | Thesis |
Language: | English |
Published: |
2017
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Online Access: | http://psasir.upm.edu.my/id/eprint/83516/1/FS%202018%2094%20-IR.pdf http://psasir.upm.edu.my/id/eprint/83516/ |
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