Description: Electron and ion densities measurement in reactive magnetron zinc sputtering plasma

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Bibliographic Details
Main Authors:	Nafarizal, Nayan, Mohd Zainizan, Sahdan, Riyaz Ahmad, Mohamad Ali, Sharifah Amira, Salwa, Omar, Mohamad Hafiz, Mamat, Uda, Hashim, Prof. Dr., Mohamad Rusop, Mahmood
Other Authors:	nafa@uthm.edu.my
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	Langmuir probe measurement Zinc magnetron sputtering plasma ZnO thin film
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33563
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