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Mask design and fabrication of Micro/Nanowire biochip for reliable and repeatability pattern transfer

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Main Authors:	Veeradasan, Perumal, Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
其他作者:	veerdasaan@hotmail.my
格式:	Article
语言:	English
出版:	Trans Tech Publications 2014
主题:	Biochip Critical dimension Mask aligner Microwire Pattern transfer
在线阅读:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33542
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