Holdings: Designing of masks for quantum dot single electron transistor fabrication using E-beam nanolithography

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Bibliographic Details
Main Authors:	Uda, Hashim, Sutikno, Madnasri, Zul Azhar, Zahid Jamal
Format:	Article
Language:	English
Published:	Nano Science and Technology Institute 2009
Subjects:	Mask design Nano patterning Proximity effect Resist dot SEM based EBL Transistors Quantum dot Single electron transistor
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/6892
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