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Influence of dissipation power in copper sputtering plasma measured by optical emission spectroscopy

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Bibliographic Details
Main Authors:	Kevin, Low, Nafarizal, Nayan, Prof. Madya Dr., Mohd Zainizan, Sahdan, Dr., Abd Kadir, Mahamad, Dr., Mohd Khairul, Ahmad, Dr., Ali Yeon, Md Shakaff, Prof. Dr., Ammar, Zakaria, Fathinul Syahir, Ahmad Sa'ad, Ahmad Faizal, Mohd Zain
Other Authors:	jwlow88@hotmail.com
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	Copper oxide Optical emission spectroscopy Reactive magnetron sputtering
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33532
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