Characterization on a-SiC thin film by X-ray diffraction, Raman spectroscopy and infrared radiation spectroscopy / Nur Syuhada Mohd Shahril
In this research, silicon carbide thin films were initially deposited by a home-build HW chemical vapors deposition (CVD) system at low temperatures 250 °C and deposition rates of 0.12 cm/s. The specific problem statement in this study is to enhance the structural properties of a-SiC thin film throu...
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| Format: | Student Project |
| Language: | English |
| Published: |
2010
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| Online Access: | https://ir.uitm.edu.my/id/eprint/72407/1/72407.PDF https://ir.uitm.edu.my/id/eprint/72407/ |
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