Influence of dissipation power in copper sputtering plasma measured by optical emission spectroscopy

• Main Authors: Kevin, Low, Nafarizal, Nayan, Prof. Madya Dr., Mohd Zainizan, Sahdan, Dr., Abd Kadir, Mahamad, Dr., Mohd Khairul, Ahmad, Dr., Ali Yeon, Md Shakaff, Prof. Dr., Ammar, Zakaria, Fathinul Syahir, Ahmad Sa'ad, Ahmad Faizal, Mohd Zain
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Trans Tech Publications 2014
• Subjects: Copper oxide; Optical emission spectroscopy; Reactive magnetron sputtering
• Online Access: http://dspace.unimap.edu.my:80/dspace/handle/123456789/33532

Link to publisher's homepage at http://www.ttp.net/