Silicon nanowire sensor by mix and match lithography process: Fabrication and characterization
Link to publisher's homepage at http://www.aip.org/
Saved in:
Main Author: | Uda, Hashim, Prof. Dr. |
---|---|
Other Authors: | uda@unimap.edu.my |
Format: | Working Paper |
Language: | English |
Published: |
American Institute of Physics
2013
|
Subjects: | |
Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/26633 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Design and fabrication of silicon nanowire based sensor
by: Siti Fatimah, Abd Rahman, et al.
Published: (2014) -
Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
by: Uda, Hashim, et al.
Published: (2009) -
Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
by: Uda, Hashim, Prof. Dr., et al.
Published: (2012) -
Application of e-beam lithography for nanowire development
by: S. Fatimah, Abd Rahman, et al.
Published: (2012) -
Fabrication of nano and micrometer structures using electron beam and optical mixed lithography process
by: Abd Rahman, S. F., et al.
Published: (2016)