Mems Microrelay: Design, Modeling, and Simulation
A newly design of single pole single throw piezoelectric vertical actuation MEMS microrelay was successfully designed and modeled at the end of this project. This was implemented by using MEMS Pro LEdit CAD Modeler. Then, the finalize bimorph sandwich fixed-fixed model had been simulated and analyze...
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| Format: | Learning Object |
| Language: | English |
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Universiti Malaysia Perlis
2008
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| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/1343 |
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