Mems Microrelay: Design, Modeling, and Simulation

• Main Author: Yap David
• Other Authors: Zaliman Sauli, P.M. (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: MEMS microrelay; SamCef Field Oofelie FEM CAD software; Microelectromechanical systems (MEMS); MEMS microrelay > Design and construction; Microelectronics; Actuators; Computer aided design; RF telecommunications
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1343

A newly design of single pole single throw piezoelectric vertical actuation MEMS microrelay was successfully designed and modeled at the end of this project. This was implemented by using MEMS Pro LEdit CAD Modeler. Then, the finalize bimorph sandwich fixed-fixed model had been simulated and analyze...