Design and simulation of PZT Piezoelectric Microphone

• Main Author: Muhammad Aiman Ab. Mahat
• Other Authors: Hasnizah Aris (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Piezoelectricity; Ultrasonic waves; Piezoelectric transducers; Microphone; Zirconium; Microelectronics > Materials; Microelectromechanical systems (MEMS)
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1960

Microphone is one of the most challenging and developing areas and markets in the field of micro sensor technology. Piezoelectric is one of sensing and actuation methods in Micro Electro Mechanical System or MEMS. This report present of two phenomenon of piezoelectric – direct and inverse effect of...