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Mems Microrelay: Design, Modeling, and Simulation

A newly design of single pole single throw piezoelectric vertical actuation MEMS microrelay was successfully designed and modeled at the end of this project. This was implemented by using MEMS Pro LEdit CAD Modeler. Then, the finalize bimorph sandwich fixed-fixed model had been simulated and analyze...

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Bibliographic Details
Main Author: Yap David
Other Authors: Zaliman Sauli, P.M. (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
MEMS microrelay
SamCef Field Oofelie FEM CAD software
Microelectromechanical systems (MEMS)
MEMS microrelay > Design and construction
Microelectronics
Actuators
Computer aided design
RF telecommunications
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1343
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