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Fabrication and characterization of microfluidic field effect transistor on silicon substrate

The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will...

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书目详细资料
主要作者:	Maizatul, Zolkapli
格式:	Thesis
语言:	English
出版:	Universiti Malaysia Perlis 2011
主题:	Transistor Silicon substrate Microfluidic FET Microelectronics Field effect transistor (FET)
在线阅读:	http://dspace.unimap.edu.my/xmlui/handle/123456789/12923
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