Fabrication and characterization of microfluidic field effect transistor on silicon substrate
The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will...
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| Format: | Thesis |
| Language: | English |
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Universiti Malaysia Perlis
2011
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| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/12923 |
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