Fabrication and characterization of microfluidic field effect transistor on silicon substrate

• Main Author: Maizatul, Zolkapli
• Format: Thesis
• Language: English
• Published: Universiti Malaysia Perlis 2011
• Subjects: Transistor; Silicon substrate; Microfluidic FET; Microelectronics; Field effect transistor (FET)
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/12923

The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will...