Development and fabrication of Ion-sensitive Field Effect Transistor (ISFET) for pH detection, DNA immobilization and hybridization

The fabrication of ion sensitive field-effect transistor (ISFET) using silicon nitride (Si3N4) as the sensing membrane is reported. The operation of ISFET is based on the surface charge adsorption of the membrane-solution interface. This thesis describes the design, fabrication and characterization...

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Bibliographic Details
Main Author: Chong, Soon Weng
Format: Thesis
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2014
Subjects:
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/31211
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