Fabrication and characterization of microfluidic field effect transistor on silicon substrate
The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 语言: | English |
| 出版: |
Universiti Malaysia Perlis
2011
|
| 主题: | |
| 在线阅读: | http://dspace.unimap.edu.my/xmlui/handle/123456789/12923 |
| 标签: |
添加标签
没有标签, 成为第一个标记此记录!
|