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Fabrication and characterization of microfluidic field effect transistor on silicon substrate

The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will...

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書誌詳細
第一著者:	Maizatul, Zolkapli
フォーマット:	学位論文
言語:	English
出版事項:	Universiti Malaysia Perlis 2011
主題:	Transistor Silicon substrate Microfluidic FET Microelectronics Field effect transistor (FET)
オンライン･アクセス:	http://dspace.unimap.edu.my/xmlui/handle/123456789/12923
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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