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Design and modeling of a CMOS MEMS gravimetric sensor

Design and modeling of a CMOS MEMS device using 0.35 ìm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequ...

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Main Authors: Abdalrahman, M.G., Dennis, J.O., Khir, M.H.M.
Format: Article
Published: 2014
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891063934&doi=10.4028%2fwww.scientific.net%2fAMM.446-447.1073&partnerID=40&md5=3cf6e9748c9da66284f823e759a7e83f
http://eprints.utp.edu.my/28551/
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spelling my.utp.eprints.285512021-09-07T08:32:34Z Design and modeling of a CMOS MEMS gravimetric sensor Abdalrahman, M.G. Dennis, J.O. Khir, M.H.M. Design and modeling of a CMOS MEMS device using 0.35 ìm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequency to achieve high sensitivity. A study on the effect of added mass on the device on natural frequency is also conducted. Mass sensitivity of this device is found to be 153 mHz/ng. At damping ratio of 0.0002, the resonant frequency of the resonator is 19.04 kHz with quality factor 3500. © (2014) Trans Tech Publications, Switzerland. 2014 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891063934&doi=10.4028%2fwww.scientific.net%2fAMM.446-447.1073&partnerID=40&md5=3cf6e9748c9da66284f823e759a7e83f Abdalrahman, M.G. and Dennis, J.O. and Khir, M.H.M. (2014) Design and modeling of a CMOS MEMS gravimetric sensor. Applied Mechanics and Materials, 446-44 . pp. 1073-1077. http://eprints.utp.edu.my/28551/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
description Design and modeling of a CMOS MEMS device using 0.35 ìm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequency to achieve high sensitivity. A study on the effect of added mass on the device on natural frequency is also conducted. Mass sensitivity of this device is found to be 153 mHz/ng. At damping ratio of 0.0002, the resonant frequency of the resonator is 19.04 kHz with quality factor 3500. © (2014) Trans Tech Publications, Switzerland.
format Article
author Abdalrahman, M.G.
Dennis, J.O.
Khir, M.H.M.
spellingShingle Abdalrahman, M.G.
Dennis, J.O.
Khir, M.H.M.
Design and modeling of a CMOS MEMS gravimetric sensor
author_facet Abdalrahman, M.G.
Dennis, J.O.
Khir, M.H.M.
author_sort Abdalrahman, M.G.
title Design and modeling of a CMOS MEMS gravimetric sensor
title_short Design and modeling of a CMOS MEMS gravimetric sensor
title_full Design and modeling of a CMOS MEMS gravimetric sensor
title_fullStr Design and modeling of a CMOS MEMS gravimetric sensor
title_full_unstemmed Design and modeling of a CMOS MEMS gravimetric sensor
title_sort design and modeling of a cmos mems gravimetric sensor
publishDate 2014
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891063934&doi=10.4028%2fwww.scientific.net%2fAMM.446-447.1073&partnerID=40&md5=3cf6e9748c9da66284f823e759a7e83f
http://eprints.utp.edu.my/28551/
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score 13.160551

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