Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO2/Si
In this study, the problem of estimating surface acoustic wave (SAW) velocity and coupling coefficient for multi-layered piezo-substrates is investigated in Aluminum Nitride/Silicon Dioxide/Silicon (AlN/SiO2/Si) using energy dissipation method. Assuming SAW energy lying within 10 times of wavelength...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2017
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85011977793&doi=10.1109%2fICIAS.2016.7824112&partnerID=40&md5=3bca6f73bd7313952b44a1171fec7dfd http://eprints.utp.edu.my/20231/ |
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