Silicon nanostructure based surface acoustic wave gas sensor
Surface acoustic wave (SAW) gas sensors with a nanostructured material-based sensing layer are highly desirable in microelectromechanical systems (MEMS) gas sensors to achieve improved sensitivity, time response, and recovery time. Herein, a novel SAW gas sensor with a nanostructured silicon (Si)-ba...
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| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2022
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/98863/ http://dx.doi.org/10.1109/SENSORS52175.2022.9967303 |
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